Comparisons between InGaP/GaAs heterojunction bipolar transistors with a sulfur- and an InGaP-passivated base surface

被引:25
作者
Tan, SW
Chen, HR
Chu, MY
Chen, WT
Lin, AH
Hsu, MK
Lin, TS
Lour, WS
机构
[1] Natl Taiwan Ocean Univ, Dept Elect Engn, Chilung 202, Taiwan
[2] Natl Univ Kaohsiung, Dept Elect Engn, Kaohsiung, Taiwan
关键词
InGaP/GaAs; heterojunction; current gain; sulfur treatment;
D O I
10.1016/j.spmi.2005.02.002
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
This paper reports on InGaP/GaAs heterojunction bipolar transistors (HBTs) with a sulfur-treated base layer, which are then compared to InGaP/GaAs HBTs with an InGaP-passivated base layer. Experimental results reveal that the improvement in base leakage current for InGaP-passivated HBTs is due to the inherent low surface recombination velocity associated with an InGaP layer while it is the electronic modification of the GaAs surface for sulfur-treated HBTs. The maximum dc current gain available is beta = 75 with a base sheet resistance of R-B = 220 Omega/square for a sulfur-passivated HBT. The sulfur-passivated HBTs also exhibit very good linearity over a wide collector current range of 10(-5) to 10(-1) A. Furthermore, detailed sulfur treatment conditions and effects on device performances including post-treatment stability are investigated. (c) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码:401 / 409
页数:9
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