An integrated opto-mechanical sensor for in situ characterisation of MEMS: the implementing of a read out architecture

被引：6

作者：

Gorecki, C ^{[1
]}

Sabac, A ^{[1
]}

Bey, P ^{[1
]}

Gut, K ^{[1
]}

Jacobelli, A ^{[1
]}

Dean, T ^{[1
]}

机构：

[1] Univ Franche Comte, CNRS, UMR 6603, Lab Opt PM Duffieux, F-25030 Besancon, France

来源：

MICROSYSTEMS ENGINEERING: METROLOGY AND INSPECTION III | 2003年 / 5145卷

关键词：

microsensors; integrated optics; MEMS; Mach Zehnder interferometry;

D O I：

10.1117/12.501463

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

While testing electrical properties in microsystems is a well-developed art, the testing of mechanical properties of MEMS devices is not. There is a great need for techniques that will permit the evaluation of MEMS devices, in all stages of manufacturing, with respect to material and micromechanical properties. In this contribution we propose a new approach, based on the integrated optical read-out using a Mach-Zehnder interferometer, monolithically integrated into the PZT actuated membrane.

引用

页码：189 / 195

页数：7

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