Ozone Sensor on Flexible Substrate by ZnO nanoparticles

被引：2

作者：

Acuautla, Monica ^{[1
]}

Bernardini, Sandrine ^{[1
]}

Bendahan, Marc ^{[1
]}

机构：

[1] Aix Marseille Univ, IM2NP, UMR 7334, CNRS, Marseille, France

来源：

MATERIALS AND APPLICATIONS FOR SENSORS AND TRANSDUCERS III | 2014年 / 605卷

关键词：

ZnO nanoparticles; drop coating; ozone gas sensor; flexible substrate; Kapton; SENSING PROPERTIES; ROOM-TEMPERATURE; NANOSTRUCTURES; GROWTH;

D O I：

10.4028/www.scientific.net/KEM.605.163

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work the ozone detection in flexible substrate has been investigated. The flexible test platform with an integrated heater was designed and then characterized by thermal simulations using finite elements and its electrical properties have been studied. ZnO nanoparticles were deposited by drop coating process on the flexible substrate with platinum interdigited electrodes for gas detection. The gas sensing properties were determined by ozone exposure at different concentrations and temperatures. The gas sensing measurements present good response at different gas concentrations, good repeatability and fast recovery.

引用

页码：163 / 166

页数：4

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