Temperature distribution in an inductively heated CZ crucible

被引：6

作者：

Du, DX ^{[1
]}

Munakata, T ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058564, Japan

来源：

JOURNAL OF CRYSTAL GROWTH | 2005年 / 283卷 / 3-4期

关键词：

computer simulation; heat transfer; Czochralski method;

D O I：

10.1016/j.jcrysgro.2005.06.048

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Temperature field in an inductively heated graphite crucible in a Czochralski crystal growth furnace is investigated experimentally and numerically at three different HF current densities. The results show that the temperature distribution in the crucible is affected by not only the radiative heat transfer but also the conductive and natural convective heat transfer in the furnace. Further, if a quartz glass tube is installed around the crucible, the natural convection is dramatically suppressed, thus higher crucible temperature is obtained. Numerical results also reveal that the temperature distributions in the crucible are affected by the relative position between crucible and induction coil due to the modification of the electromagnetic field in the CZ furnace. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：563 / 575

页数：13