MEMS Bragg grating force sensor

被引：17

作者：

Reck, Kasper ^{[1
]}

Thomsen, Erik V. ^{[1
]}

Hansen, Ole ^{[2
]}

机构：

[1] Tech Univ Denmark, DTU Nanotech, Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

[2] Tech Univ Denmark, CINF, DK-2800 Lyngby, Denmark

来源：

OPTICS EXPRESS | 2011年 / 19卷 / 20期

基金：

新加坡国家研究基金会;

关键词：

STRAIN;

D O I：

10.1364/OE.19.019190

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors. (C) 2011 Optical Society of America

引用

页码：19190 / 19198

页数：9

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