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High temperature properties of CrAlN, CrAlSiN and AlCrSiN coatings - Structure and oxidation
被引:122
作者:
Polcar, Tomas
[1
,2
]
Cavaleiro, Albano
[2
]
机构:
[1] Czech Tech Univ, Fac Elect Engn, Dept Control Engn, Prague 16627 6, Czech Republic
[2] Univ Coimbra, SEG CEMUC Dept Mech Engn, P-3030788 Coimbra, Portugal
关键词:
Thin films;
Oxidation;
Thermogravimetric analysis;
Arc discharges;
Diffusion;
SI-N COATINGS;
ELEVATED-TEMPERATURES;
CRN COATINGS;
FILMS;
BEHAVIOR;
ARC;
TIALN;
TIN;
D O I:
10.1016/j.matchemphys.2011.03.078
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
CrAlN, CrAlSiN and AlCrSiN coatings were deposited by cathodic arc deposition technique from composite targets. Three targets were used: (i) Cr/Al ratio close to 1, (ii) Cr/Al ratio close to 1 with Si addition, and (iii) Cr/Al ratio close to 1/2 and Si addition. Nitrogen flow was kept constant during the depositions. The Cr/Al ratio of the films, measured by electron probe microanalysis (EPMA), was similar to that of the target and the silicon content was in the range 3-4 at.%. The coatings were deposited onto FeCrAl alloy and WC/Co mirror-polished substrates. To analyze the coating structure, X-ray photoelectron (XPS) and X-ray diffraction (XRD) analysis were used. The evolution of the coating structure up to 1000 degrees C was in situ measured in a XRD apparatus equipped with heating plate. The films oxidation behavior was characterized by thermogravimetric analysis (TGA) at two selected temperatures. The annealed coatings were analyzed by XRD and scanning electron microscopy with energy-dispersive X-ray spectroscopy (EDX). CrAlSiN showed low oxidation resistance being partially oxidized at 800 degrees C. Moreover, the film exhibited low thermal stability, since the cubic nitride phases transformed to hexagonal nitrides at relatively low temperatures. CrAlN oxidation behavior was more promising; nevertheless. AlCrSiN showed excellent thermal stability with cubic nitrides observed even after heating to 1300 degrees C. The oxidation of this film at 900 and 1000 degrees C was negligible. (C) 2011 Elsevier B.V. All rights reserved.
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页码:195 / 201
页数:7
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