Investigation of the Carbon Monoxide Gas Sensing Characteristics of Tin Oxide Mixed Cerium Oxide Thin Films

被引：52
作者：
Durrani, Sardar M. A. [1 ]
Al-Kuhaili, Mohammad F. [1 ]
Bakhtiari, Imran A. [1 ]
Haider, Muhammad B. [1 ]
机构：
[1] King Fahd Univ Petr & Minerals, Dept Phys, Dhahran 31261, Saudi Arabia
来源：
SENSORS | 2012年 / 12卷 / 03期
关键词：
thin film; AFM; XPS; CeO2; SnO2; CO sensor; semiconductor gas sensor; SENSITIVITY; CO; SENSOR; OXYGEN; DEPENDENCE; DEPOSITION; XPS;
D O I：
10.3390/s120302598
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Thin films of tin oxide mixed cerium oxide were grown on unheated substrates by physical vapor deposition. The films were annealed in air at 500 degrees C for two hours, and were characterized using X-ray photoelectron spectroscopy, atomic force microscopy and optical spectrophotometry. X-ray photoelectron spectroscopy and atomic force microscopy results reveal that the films were highly porous and porosity of our films was found to be in the range of 11.6-21.7%. The films were investigated for the detection of carbon monoxide, and were found to be highly sensitive. We found that 430 degrees C was the optimum operating temperature for sensing CO gas at concentrations as low as 5 ppm. Our sensors exhibited fast response and recovery times of 26 s and 30 s, respectively.
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页码：2598 / 2609
页数：12
相关论文
共 30 条
[1]  
Barreca D, 2007, NANOTECHNOLOGY, V18
[2]   Gas sensing properties of thin- and thick-film tin-oxide materials [J].
Becker, T ;
Ahlers, S ;
Bosch-vonBraunmühl, C ;
Müller, G ;
Kiesewetter, O .
SENSORS AND ACTUATORS B-CHEMICAL, 2001, 77 (1-2) :55-61
[3]   Influence of the deposition method on the morphology and elemental composition of SnO2 films for gas sensing:: atomic force and X-ray photoemission spectroscopy analysis [J].
Bittencourt, C ;
Llobet, E ;
Silva, MAP ;
Landers, R ;
Nieto, L ;
Vicaro, KO ;
Sueiras, JE ;
Calderer, J ;
Correig, X .
SENSORS AND ACTUATORS B-CHEMICAL, 2003, 92 (1-2) :67-72
[4]   Carbon monoxide gas-sensing properties of electron-beam deposited cerium oxide thin films [J].
Durrani, S. M. A. ;
Al-Kuhaili, M. F. ;
Bakhtiari, I. A. .
SENSORS AND ACTUATORS B-CHEMICAL, 2008, 134 (02) :934-939
[5]   Effect of biasing voltages and electrode metals and materials on the sensitivity of electron beam evaporated HfO2 thin film CO sensor [J].
Durrani, S. M. A. ;
AI-Kuhaili, M. F. .
MATERIALS CHEMISTRY AND PHYSICS, 2008, 109 (01) :56-60
[6]   Biasing voltage dependence of sensitivity of electron beam evaporated SnO2 thin film CO sensor [J].
Durrani, Sardar M. Ayub .
SENSORS, 2006, 6 (09) :1153-1160
[7]   Gas-sensing properties of sprayed films of (CdO)x(ZnO)1-x mixed oxide [J].
Ferro, R ;
Rodríguez, JA ;
Jiménez, I ;
Cirera, A ;
Cerdà, J ;
Morante, JR .
IEEE SENSORS JOURNAL, 2005, 5 (01) :48-52
[8]   Electrostatic spray deposited zinc oxide films for gas sensor applications [J].
Ghimbeu, Camelia Matei ;
Schoonman, Joop ;
Lumbreras, Martine ;
Siadat, Maryam .
APPLIED SURFACE SCIENCE, 2007, 253 (18) :7483-7489
[9]   Nano-crystalline Cu-doped ZnO thin film gas sensor for CO [J].
Gong, H ;
Hu, JQ ;
Wang, JH ;
Ong, CH ;
Zhu, FR .
SENSORS AND ACTUATORS B-CHEMICAL, 2006, 115 (01) :247-251
[10]   RELATIONSHIP BETWEEN OPTICAL INHOMOGENEITY AND FILM STRUCTURE [J].
HARRIS, M ;
MACLEOD, HA ;
OGURA, S ;
PELLETIER, E ;
VIDAL, B .
THIN SOLID FILMS, 1979, 57 (01) :173-178
123