Zinc-blende (Cubic) GaN and AlGaN Layers, Structures and Bulk Crystals by Molecular Beam Epitaxy

被引:0
|
作者
Novikov, Sergei V. [1 ]
Zainal, Norzaini [1 ]
Akimov, Andrey V. [1 ]
Staddon, Chris R. [1 ]
Foxon, C. Thomas [1 ]
Kent, Anthony J. [1 ]
机构
[1] Univ Nottingham, Sch Phys & Astron, Nottingham NG7 2RD, England
来源
2010 WIDE BANDGAP CUBIC SEMICONDUCTORS: FROM GROWTH TO DEVICES | 2010年 / 1292卷
关键词
Semiconducting III-V materials; Nitrides; Zinc-blende Gallium-Nitride (c-GaN); VAPOR-PHASE EPITAXY; OPTICAL-PROPERTIES; GROWTH; PHOTOLUMINESCENCE; SAPPHIRE; GAAS;
D O I
暂无
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have studied the growth of zinc-blende GaN and AlGaN layers, structures and bulk crystals by molecular beam epitaxy (MBE). We have developed a process for growth by MBE of free-standing cubic GaN layers. Undoped thick cubic GaN films were grown on semi-insulating GaAs (001) substrates by a modified plasma-assisted molecular beam epitaxy (PA-MBE) method and were removed from the GaAs substrate after the growth. The resulting freestanding GaN wafers with thicknesses in the 30-100 mu m range may be used as substrates for further epitaxy of cubic GaN-based structures and devices. We have developed procedures to cleave the wafers into 10x10 mm(2) square substrates and to polish them to produce epi-ready surfaces. The first GaN/InGaN LEDs on our zinc-blende GaN substrates have been demonstrated by our collaborators at Sharp Laboratories of Europe.
引用
收藏
页码:154 / 158
页数:5
相关论文
共 50 条
  • [1] Zinc-blende (cubic) GaN bulk crystals grown by molecular beam epitaxy
    Novikov, S. V.
    Foxon, C. T.
    Kent, A. J.
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 8, NO 5, 2011, 8 (05): : 1439 - 1444
  • [2] Molecular beam epitaxy as a method for the growth of free-standing bulk zinc-blende GaN and AlGaN crystals
    Novikov, S. V.
    Staddon, C. R.
    Foxon, C. T.
    Luckert, F.
    Edwards, P. R.
    Martin, R. W.
    Kent, A. J.
    JOURNAL OF CRYSTAL GROWTH, 2011, 323 (01) : 80 - 83
  • [3] Molecular beam epitaxy as a method for the growth of freestanding zinc-blende (cubic) GaN layers and substrates
    Novikov, S. V.
    Zainal, N.
    Akimov, A. V.
    Staddon, C. R.
    Kent, A. J.
    Foxon, C. T.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2010, 28 (03):
  • [4] Doping of free-standing zinc-blende GaN layers grown by molecular beam epitaxy
    Novikov, S. V.
    Powell, R. E. L.
    Staddon, C. R.
    Kent, A. J.
    Foxon, C. T.
    JOURNAL OF CRYSTAL GROWTH, 2014, 403 : 43 - 47
  • [5] Growth of zinc-blende GaN on muscovite mica by molecular beam epitaxy
    Daudin, Bruno
    Donatini, Fabrice
    Bougerol, Catherine
    Gayral, Bruno
    Bellet-Amalric, Edith
    Vermeersch, Remy
    Feldberg, Nathaniel
    Rouviere, Jean-Luc
    Recio Carretero, Maria Jose
    Garro, Nuria
    Garcia-Orrit, Saul
    Cros, Ana
    NANOTECHNOLOGY, 2021, 32 (02)
  • [6] Zinc-blende and wurtzite AlxGa1-xN bulk crystals grown by molecular beam epitaxy
    Novikov, S. V.
    Staddon, C. R.
    Luckert, F.
    Edwards, P. R.
    Martin, R. W.
    Kent, A. J.
    Foxon, C. T.
    JOURNAL OF CRYSTAL GROWTH, 2012, 350 (01) : 80 - 84
  • [7] Study of unintentional arsenic incorporation into free-standing zinc-blende GaN and AlGaN layers grown by molecular beam epitaxy on GaAs substrates
    Novikov, S. V.
    Zainal, N.
    Foxon, C. T.
    Kent, A. J.
    Luckert, F.
    Edwards, P. R.
    Martin, R. W.
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 7, NO 7-8, 2010, 7 (7-8):
  • [8] Free-standing zinc-blende (cubic) GaN layers and substrates
    Novikov, S. V.
    Stanton, N. M.
    Campion, R. P.
    Foxon, C. T.
    Kent, A. J.
    JOURNAL OF CRYSTAL GROWTH, 2008, 310 (17) : 3964 - 3967
  • [9] Free-standing zinc-blende (cubic) GaN substrates grown by a molecular beans epitaxy process
    Foxon, C. T.
    Novikov, S. V.
    Stanton, N. M.
    Campion, R. P.
    Kent, A. J.
    PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2008, 245 (05): : 890 - 892
  • [10] Droplet epitaxy of zinc-blende GaN quantum dots
    Schupp, T.
    Meisch, T.
    Neuschl, B.
    Feneberg, M.
    Thonke, K.
    Lischka, K.
    As, D. J.
    JOURNAL OF CRYSTAL GROWTH, 2010, 312 (21) : 3235 - 3237