Effects of oxygen concentration on the properties of sputtered SnO2:Sb films deposited at low temperature

被引：78
作者：
Lee, Jaehyeong [1 ]
机构：
[1] Kunsan Natl Univ, Sch Elect & Informat Engn, Kunsan 573701, Jeollabuk Do, South Korea
来源：
THIN SOLID FILMS | 2008年 / 516卷 / 07期
关键词：
tin oxide (SnO2); transparent conducting oxide (TCO); sputtering; oxygen gas ratio;
D O I：
10.1016/j.tsf.2007.05.027
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Antimony doped tin oxide (SnO2:Sb) films have been prepared by d.c. magnetron sputtering and the properties of the films depend on deposition conditions, such as O-2 gas ratio, were investigated. The gas composition was found to affect the properties of the films. With the incorporation additional oxygen, the electrical and optical properties of films significantly improved. The minimum value of resistivity of the films was 4.9 x 10(-3) Omega cm at the oxygen concentration of 30% and the optical transmittance was over 80%. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：1386 / 1390
页数：5
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