Comparison of Analog and Noise Performance between Buried Channel versus Surface Devices in HKMG I/O Devices

被引：4

作者：

Pirro, L. ^{[1
]}

Jayakumar, A. ^{[1
]}

Zimmerhackl, O. ^{[1
]}

Lipp, D. ^{[1
]}

Illgen, R. ^{[1
]}

Muehlhoff, A. ^{[1
]}

Pfuetzner, R. ^{[1
]}

Zaka, A. ^{[1
]}

Otto, M. ^{[1
]}

Hoentschel, J. ^{[1
]}

Raffel, Y. ^{[2
]}

Seidel, K. ^{[2
]}

Olivo, R. ^{[2
]}

机构：

[1] GLOBALFOUNDRIES Fab1 LLC & Co KG, Dresden, Saxony, Germany

[2] Fraunhofer IPMS, Dresden, Saxony, Germany

来源：

2021 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS) | 2021年

关键词：

LFN; flicker noise; buried-channel; RTS; intrinsic gain; DESIGN;

D O I：

10.1109/IRPS46558.2021.9405122

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work buried channel devices were successfully integrated in HKMG. Analog, noise and reliability performance have been reported and compared to a surface device. The devices were processed to have the same V-Tsat for the nominal geometry of a corresponding surface device. Advantages and drawbacks of the two integrations are discussed and explained with the support of calibrated TCAD simulations.

引用

页数：4

共 9 条

[1]

Haruta T, 2017, ISSCC DIG TECH PAP I, P76, DOI 10.1109/ISSCC.2017.7870268

[2] DESIGN TRADEOFFS BETWEEN SURFACE AND BURIED-CHANNEL FETS [J].

HU, GJ ;

BRUCE, RH .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (03) :584-588

[3]

Jayakumar A., 2020, ICMTS, P3

[4] A Statistical Evaluation of Random Telegraph Noise of In-Pixel Source Follower Equivalent Surface and Buried Channel Transistors [J].

Kuroda, Rihito ;

Yonezawa, Akihiro ;

Teramoto, Akinobu ;

Li, Tsung-Ling ;

Tochigi, Yasuhisa ;

Sugawa, Shigetoshi .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 2013, 60 (10) :3555-3561

[5]

Otto M., 2017, EUROSOI ULIS, P5

[6]

Pirro L., 2019, IRPS, P1

[7] A g(m)/I-D based methodology for the design of CMOS analog circuits and its application to the synthesis of a silicon-on-insulator micropower OTA [J].

Silveira, F ;

Flandre, D ;

Jespers, PGA .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1996, 31 (09) :1314-1319

[8]

Wei A, 2014, IEDM

[9]

Yonezawa A., 2012, IRPS

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