Preparation of ZnO nanostructures by RF-magnetron sputtering on thermally oxidized porous silicon substrate for VOC sensing application

被引：45

作者：

Al-Salman, Husam S. ^{[1
,2
]}

Abdullah, M. J. ^{[1
]}

机构：

[1] Univ Sains Malaysia, Sch Phys, George Town 11800, Malaysia

[2] Univ Basrah, Coll Sci, Dept Phys, Basrah, Iraq

来源：

MEASUREMENT | 2015年 / 59卷

关键词：

ZnO nanostructure; Oxidized PS; RF-sputtering; VOC sensing application; DOPED ZNO; FILMS; LAYER; TEMPERATURE; PERFORMANCE; GROWTH; PHOTOLUMINESCENCE; NANOFIBERS; DEPENDENCE; MORPHOLOGY;

D O I：

10.1016/j.measurement.2014.08.011

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

ZnO nanostructures were grown on thermally oxidized porous silicon (PS) substrates by RF-magnetron sputtering for volatile organic compounds (VOCs) sensing applications. PS was fabricated by electrochemical anodization of n-type crystalline silicon in an ethanoic hydrofluoric acid solution to produce a PS surface. X-ray diffraction (XRD) analysis confirmed that the ZnO nanostructure highly preferred an (002) phase orientation. The sensitivities of the ZnO/oxidized PS sensor investigated for 22 ppm of acetone, ethanol, iso-propanol, and toluene vapor at the optimum operating temperature of 250 degrees C were 79.6%, 83.4%, 69.3%, and 69%, respectively. The ZnO/oxidized PS sensor can be detect VOC vapor up to 2 ppm. (C) 2014 Elsevier Ltd. All rights reserved.

引用

页码：248 / 257

页数：10

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