Freestanding, micromachined, multimode silicon optical waveguides at λ = 1.3 μm for microelectromechanical systems technology

Freestanding, multimode optical channel waveguides formed by micromachining silicon are demonstrated. Fabrication utilizes standard microelectromechanical systems (MEMS) technology. Losses in the 0.57-0.80-dB/cm range are measured for channel waveguides with an air-silicon-air structure, whereas losses in the 1.12-1.52-dB/cm range are measured for channel waveguides with a SiO2-silicon-SiO2 structure. Freestanding channel waveguides, along with optical fibers and other MEMS structures, can readily be mounted on a silicon MEMS platform to provide optimal alignment for maximizing optical coupling, and they are thus expected to be useful in devices that involve light and MEMS structures. (C) 1998 Optical Society of America.