A new design for rotational, tunable wideband RF MEMS capacitors

被引：4

作者：

Pagazani, Julien ^{[1
,2
]}

Nicole, Pierre ^{[1
]}

Rousseau, Lionel ^{[2
]}

Marty, Frederic ^{[2
]}

Lissorgues, Gaelle ^{[2
]}

机构：

[1] THALES Airborne Syst, F-78851 Elancourt, France

[2] Univ Paris Est, ESYCOM, ESIEE Paris, Sch Engn, F-93162 Noisy Le Grand, France

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2011年 / 17卷 / 04期

关键词：

Radio Frequency; Voltage Control Oscillator; Actuation Voltage; DRIE Step; Rotational Displacement;

D O I：

10.1007/s00542-011-1226-x

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Wide range tunable components are a key point for high frequency performances. We have developed a novel RF MEMS rotational capacitor based on surface variation and high displacement. This paper will present multiple designs with physical parameter variations for comparative test with fabricated device measurements. The goal of this work is to prove the proper operation of the devices according to fulfill target performances. The main parameters will be tunability, capacitance value, resonance frequency and finally maximal actuation voltage allowed.

引用

页码：513 / 522

页数：10

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