Multi-segmented piezoelectric mirrors as active/adaptive optics components

The angular acceptance of piezoelectric (Pzt) bimorph mirrors is limited by the maximum length of commercially available Pzt ceramic plates. To overcome this limit and manufacture longer devices, several (2n + 1) 150 mm-long bimorph Pzt stacks were assembled side-to-side. Two prototype mirrors, 450 (n = 1) and 750 (n = 2) mm long, were designed, assembled, polished and optically characterized. They are fully UHV compatible and are now installed in the monochromatic section of the ESRF beamlines ID26 and ID32. Both mirrors cover the full range of required bending radii (1 km ccncave-3.5 km convex). Junctions between segments do not spoil the optical surface quality. The surface slope error r.m.s. can be kept well below 1 arcsec over the full bending range. Adaptive compensation for low-frequency figure errors was shown to be easy and reliable. After compensation, residual shape errors are of the order of 40 nm r.m.s. over 700 mm.