Deformable polymer adaptive optical mirrors

被引:20
作者
Friese, Christoph [1 ,2 ]
Zappe, Hans [1 ]
机构
[1] Univ Freiburg, Dept Microsyst Engn, Lab Micro Opt, D-79085 Freiburg, Germany
[2] Robert Bosch GmbH, D-72762 Reutlingen, Germany
关键词
adaptive optics; deformable mirror; micro-electromechanical; devices; micromachining; micromirror; optical-device; fabrication; optical distortion; optical pulse shaping; optimization methods; polymer technology; SU-8;
D O I
10.1109/JMEMS.2007.913075
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The design, fabrication, and evaluation of deformable polymer-based micromirror devices for adaptive optic applications are described. For the mirror membranes, a freestanding polymer foil is used, which features key advantages with respect to its mechanical behavior when compared with the silicon-micromachined membranes. The fabrication technology, mirror-membrane design, packaging, and operation in a feedback-controlled closed-loop system are outlined. The feasibility for the use of the prototypes in advanced adaptive optic systems is evaluated.
引用
收藏
页码:11 / 19
页数:9
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