Microstructure, mechanical and tribological properties of WC/a-C:H coatings deposited by cathodic arc ion-plating

被引：27
|
作者：
Wang, Wei [1 ,2 ]
Pelenovich, Vasiliy O. [1 ,2 ]
Yousaf, M. I. [1 ,2 ]
Yan, Shaojian [1 ,2 ]
Bin, Han [1 ,2 ]
Wang, Zesong [1 ,2 ]
Tolstogouzov, A. B. [3 ,4 ]
Kumar, P. [5 ]
Yang, Bing [6 ]
Fu, De Jun [1 ,2 ]
机构：
[1] Wuhan Univ, Minist Educ, Key Lab Artificial Micro & Nanomat, Wuhan 430072, Peoples R China
[2] Wuhan Univ, Sch Phys & Technol, Wuhan 430072, Peoples R China
[3] Ryazan State Radio Engn Univ, Ul Gagarina 59-1, Ryazan 390005, Russia
[4] Univ Nova Lisboa, Fac Ciencias & Tecnol, Ctr Fis & Invest Tecnol, P-2829516 Caparica, Portugal
[5] IUAC, Aruna Asaf Ali Marg, New Delhi 110067, India
[6] Wuhan Univ, Sch Power & Mech Engn, Wuhan 430072, Peoples R China
来源：
VACUUM | 2016年 / 132卷
基金：
中国国家自然科学基金;
关键词：
Cathodic arc ion-plating; Tungsten carbide; Hydrogenated carbon; RBS; AMORPHOUS-CARBON; NANOCRYSTALLINE WC; VACUUM-ARC; FILMS; MULTILAYERS; LAYERS;
D O I：
10.1016/j.vacuum.2016.07.023
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Nanocomposite WC/a-C:H coatings were deposited in a cathodic arc ion-plating system, in which a WC target in Ar + C2H2 atmosphere and a variable acetylene flow of 0-200 sccm were used. The synthesized coatings contain 6-29 at.% of tungsten with a thickness of 1-2 mu m. X-ray diffraction revealed the presence of only cubic WC1-x phase with a grain size of 2.5 nm. Rutherford backscattering technique was utilized to study elemental composition and structure of the coatings. X-ray photoelectron spectroscopy and Raman scattering were used to study the amorphous carbon component. The nanohardness is greatly influenced by tungsten concentration and is decreased from 26 GPa to 15 GPa by decreasing tungsten concentration. The critical load L-c2 demonstrates more complex behavior and the coatings spall off at 35 N. The coatings with tungsten concentration of 6-10 at.% show good tribological properties with coefficient of friction of 0.12-0.13 against Si3N4 ball and wear rate of 6.7 x 10(-7) mm(3)/N.m. (C) 2016 Elsevier Ltd. All rights reserved.
引用
收藏
页码：31 / 39
页数：9
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