Magnetic Actuation of Ultra-Compliant Micro Robotic Mechanisms

This work presents highly flexible elastomer and silicon micro robotic mechanisms actuated using embedded permanent magnets manipulated by an external magnetic field. The mechanisms are fabricated using a process to incorporate elastomer hinges and other features into silicon MEMS, and a method for embedding small magnets via press-fit into an elastomer sleeve. Fabricated mechanisms have demonstrated inplane bending, out of plane bending, and underactuated compliant gripping. In-plane bending mechanisms have achieved up to 150 ffi of deflection, out of plane bending mechanisms have achieved up to 90 ffi bending perpendicular to the surface of the chip, and the 4.4 mm x 3.8 mm x 0.3 mm gripper can passively grip objects up to 1.5 mm in size and as small as 0.5 mm. The mechanisms demonstrated can be used as actuated portions of larger mechanisms, for out-of-plane assembly, or for on-chip manipulation.