In situ growth of WO3 nanotube arrays and their H2S gas sensing properties for reduced operating temperature

被引：16
|
作者：
San, Xiaoguang [1 ]
Lu, Yiming [1 ]
Wang, Guosheng [1 ]
Meng, Dan [1 ]
Gong, Xiaohui [1 ]
Jin, Quan [2 ]
机构：
[1] Shenyang Univ Chem Technol, Coll Chem Engn, Shenyang 110142, Peoples R China
[2] Jilin Univ, Sch Mat Sci & Engn, Key Lab Automobile Mat, Minist Educ, 5988 Renmin St, Changchun 130022, Peoples R China
来源：
MATERIALS LETTERS | 2020年 / 271卷
基金：
中国国家自然科学基金;
关键词：
WO3; Nanotube arrays; Thermal evaporation method; H2S; Sensors; Semiconductors; HIGH RESPONSE; FILM;
D O I：
10.1016/j.matlet.2020.127716
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Tungsten oxide (WO3) has a great significance in variety of fields. In this work, WO3 nanotube arrays (NTs) were successfully fabricated onto a Si substrate covered with WO3 thin film by thermal evaporation method. Various characterization indicated that these NTs show a hexagonal shape at their tips and the side planes are well-faceted. The formation mechanism of NTs induced by WO3 thin film seeds was detailed discussed. Furthermore, the H2S sensing performance was analyzed and exhibited good performance at low temperature, which is beneficial to saving power and integrated device. Therefore, this study provides a simple and universal method for the preparation of metal oxide nanotube arrays, which provides a useful platform for the high-performance gas sensors.<bold> </bold>
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页数：4
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