Microscale friction investigation of polysilicon surface using scanning force microscopy

被引：1
|
作者：
Flueraru, C
Cobianu, C
Dascalu, D
Flueraru, M
机构：
[1] Inst Microtechnol, Bucharest 72225, Romania
[2] Univ Bucharest, Dept Organ Chem, Bucharest, Romania
来源：
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS | 1998年 / 3卷 / 01期
关键词：
D O I：
10.1051/epjap:1998200
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Microscale phenomena between the surface of chemically vapour deposited silicon films and a silicon nitride tip was investigated using Scanning Force Microscopy. An analysis of friction forces for different scan directions is presented. Ebr different applied forces, the friction forces were measured and consequently the friction coefficient was calculated. We found that the average friction force linearly increases with the applied force and is reversible when unloading. Connection between the surface roughness and the friction coefficient was experimentally demonstrated.
引用
收藏
页码：29 / 33
页数：5
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