Fundamental study on nano domain engineering using scanning nonlinear dielectric microscopy

Scanning nonlinear dielectric microscopy (SNDM) is the first successful purely electrical method for observing the ferroelectric domain on the sub-nanometer order. As another high-resolution method for measuring ferroelectric domains, the piezoelectric response imaging method is often reported. In this study, it is confirmed that SNDM has a much higher resolution than piezoelectric imaging under the same experimental condition using the same system. First, the resolution of SNDM is described, and then, the resolution of SNDM is compared with that of piezoelectric imaging. Finally, a fundamental study for applying the SNDM system to a ferroelectric reading-recording system is performed, and it is concluded that SNDM has sufficient performance for application to the ferroelectric memory system.