BaTiO3 thin film prepared by coating-pyrolysis process on Nb-doped SrTiO3 substrate

被引:8
作者
Kim, S [1 ]
Kwon, OY [1 ]
机构
[1] Yosu Natl Univ, Dept Chem Engn, Yosu 550749, South Korea
关键词
D O I
10.1023/A:1004556409723
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Epitaxial BaTiO3 thin film was prepared on Nb-doped SrTiO3 substrate by coating-pyrolysis process using a mixed solution of barium and titanium naphthenates. The amorphous film pyrolyzed at 470 degrees C was crystallized with high orientation after heat-treatment at 850 degrees C under low oxygen partial pressure. X-ray diffraction theta/2 theta and beta scans indicated that the BaTiO3 film was epitaxial relationship with Nb-doped SrTiO3 substrate. The dielectric constant was approximately 230 at 10(3) Hz and was monotonically decreased with increasing of frequency at room temperature. (C) 1999 Kluwer Academic Publishers.
引用
收藏
页码:707 / 709
页数:3
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