Structure and electrical properties of (100)-oriented Pb(Zn1/3Nb2/3)O3-Pb (Mg1/3Nb2/3)O3-PbTiO3 thin films on La0.7Sr0.3MnO3 electrode by chemical solution deposition

被引:8
作者
Huang, Alicia [1 ]
Yao, Kui [1 ]
Wang, John [2 ]
机构
[1] Inst Mat Res & Engn, Singapore 117602, Singapore
[2] Natl Univ Singapore, Dept Mat Sci & Engn, Singapore 117574, Singapore
关键词
ferroelectric properties; piezoelectric effect; perovskite; conductive oxide; chemical solution deposition;
D O I
10.1016/j.tsf.2008.02.007
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
(100)-oriented 0.462Pb(Zn1/3Nb2/3)O-3-0.308Pb(Mg1/3Nb2/3)O-3-0.23PbTiO(3) (PZN-PMN-PT) perovskite ferroelectric thin films were prepared on La0.7Sr0.3MnO3/LaAlO3 (LSMO/LAO) substrate via a chemical solution deposition route. The perovskite LSMO electrode was found to effectively suppress the pyrochlore phase while promote the growth of the perovskite phase in the PZN-PMN-PT film. The film annealed at 700 degrees C exhibited a high dielectric constant of 2130 at 1 kHz, a remnant polarization, 2P(r), of 29.8 mu C/cm(2), and a low leakage current density of 7.2 x 10(-7) A/cm(2) at an applied field of 200 kV/cm. The ferroelectric polarization was fatigue-free at least up to 10(10) cycles. Piezoelectric coefficient, d(33), of 48 pm/V was also demonstrated. The results showed that much superior properties could be achieved with the PZN-PMN-PT thin films on the solution derived LSMO electrode than on Pt electrode by sputtering. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:5057 / 5061
页数:5
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