Temperature and Light Induced Effects on the Capacitance of 4H-SiC Schottky Photodiodes

被引:17
|
作者
Mazzillo, Massimo [1 ]
Sciuto, Antonella [2 ]
Catania, Giuseppe [1 ]
Roccaforte, Fabrizio [2 ]
Raineri, Vito [2 ]
机构
[1] STMicroelect, R&D IMS, I-95121 Catania, Italy
[2] CNR IMM, I-95121 Catania, Italy
关键词
Capacitance; light irradiance; temperature; 4H-SiC Schottky photodiode;
D O I
10.1109/JSEN.2011.2166541
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The capacitance plays a key role in determining the timing performances of a detector. To date, this parameter has never been fully investigated in the study of SiC photodiodes electro-optical characteristics. In this paper, we report on the capacitance dependence of interdigitated 4H-SiC Schottky photodiodes on different operating parameters like reverse bias, temperature, light irradiance and illumination wavelength.
引用
收藏
页码:1127 / 1130
页数:4
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