[INVITED] Silicon nitride photonic integration for visible light applications

被引：88

作者：

Porcel, Marco A. G. ^{[1
]}

Hinojosa, Alberto ^{[1
]}

Jans, Hilde ^{[2
]}

Stassen, Andim ^{[2
]}

Goyvaerts, Jeroen ^{[2
]}

Geuzebroek, Douwe ^{[3
]}

Geiselmann, Michael ^{[4
]}

Dominguez, Carlos ^{[5
]}

Artundo, Inigo ^{[1
]}

机构：

[1] Univ Politecn Valencia, VLC Photon SL Ed 9B D2, Camino Vera S-N, Valencia 46022, Spain

[2] IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium

[3] LioniX Int, Hengelosestr 500, NL-7521 AN Enschede, Netherlands

[4] LIGENTEC SA, EPFL Innovat Pk,Batiment C, CH-1015 Lausanne, Switzerland

[5] Campus Univ Autanoma Barcelona UAB, IMB, CNM, CSIC,C Tillers, Barcelona 08193, Bellaterra, Spain

来源：

OPTICS AND LASER TECHNOLOGY | 2019年 / 112卷

基金：

欧盟地平线“2020”;

关键词：

Photonics; Silicon nitride; Visible light; Biophotonics; Sensing; Microscopy; WAVE-GUIDE IMMUNOSENSOR; SUPERCONTINUUM GENERATION; RESOLUTION LIMIT; OPTICAL SENSORS; RING RESONATORS; CHIP;

D O I：

10.1016/j.optlastec.2018.10.059

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this article, we provide a review of fabrication platforms and state of the art developments in the area of silicon nitride photonic integrated circuits (PICs) for the visible wavelength range, mostly employed in biomedical and chemical sensing applications. Additionally, we introduce PIX4life, the European pilot line for silicon nitride PICs for visible applications. PIX4life provides a unified framework for the development of such PICs, including design and software, fabrication, characterization and packaging.

引用

页码：299 / 306

页数：8

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