An experimental investigation on rotary ultrasonic machining

The rotary ultrasonic machining (rotary USM) is considered as an effective machining method, which has been mainly used to drill holes in hard and brittle materials such as glass, ceramics, quartz and semiconductors. In this paper, a new machining method that combines the rotary USM with the CNC technology for the contour machining of hard and brittle materials is proposed. The experimental system is set up. On the basis of experimental investigation, the mechanism of rotary USM and the effects of the process parameters on the material removal rate (MRR) are analyzed. The investigation shows that compared with conventional USM, the rotary USM has higher MRR, and can be combined with CNC technology in hard and brittle material machining.