Structural study of SiC(0001)3 x 3 surface by surface X-ray diffraction

被引：6

作者：

Aoyama, T ^{[1
]}

Akimoto, K

Ichimiya, A

Hisada, Y

Mukainakano, S

Emoto, T

Tajiri, H

Takahashi, T

Sugiyama, H

Zhang, X

Kawata, H

机构：

[1] Nagoya Univ, Dept Quantum Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan

[2] DENSO Corp, Res Labs, Aichi 4700111, Japan

[3] Toyota Natl Coll Technol, Toyota 4718525, Japan

[4] Univ Tokyo, Inst Solid State Phys, Kashiwa, Chiba 2778581, Japan

[5] High Energy Accelerator Res Org, Photon Factory, Tsukuba, Ibaraki 3050801, Japan

来源：

APPLIED SURFACE SCIENCE | 2003年 / 216卷 / 1-4期

关键词：

X-ray diffraction; reconstructed structure; SiC;

D O I：

10.1016/S0169-4332(03)00431-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Surface structure of 6H-SiC(0001)3 x 3 reconstruction has been studied by grazing incidence X-ray diffraction with synchrotron radiation. We compared the Patterson map obtained from experimental structure factors with calculated Patterson maps estimated from the models that had been proposed. As the result, the calculated Patterson maps of Kulakov et al.'s [Surf. Sci. 346 (1996) 49] and Starke and coworkers' models [Phys. Rev. Lett. 80 (1998) 758; Phys. Rev. B 58 (1998) 10806; Surf. Rev. Lett. 6 (1999) 1129; Appl. Surf. Sci. 162-163 (2000) 9; Phys. Rev. B 62 (2000) 10335] are relatively in good agreement with experimental one. Therefore, we conclude that there is high possibility that either Kulakov et al.'s or Starke and coworkers' models are reasonable as the actual 3 x 3 structure. (C) 2003 Elsevier Science B.V All rights reserved.

引用

页码：356 / 360

页数：5

共 15 条

[1] Structural study of the SiC(0001)(√3 x √3-)-R30° surfaces by reflection high-energy electron diffraction rocking curves [J].

Aoyama, T ;

Hisada, Y ;

Mukainakano, S ;

Ichimiya, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2002, 41 (2B) :L174-L177

[2] Structural analysis of 6H-SiC(0001) surface by RHEED rocking curves [J].

Aoyama, T ;

Han, YJ ;

Ichimiya, A ;

Hisada, Y ;

Mukainakano, S .

SURFACE SCIENCE, 2001, 493 (1-3) :246-252

[3]

BARZIAG P, 1998, SURF SCI, V402, P822

[4] Surface structure of hexagonal SiC surfaces: key to crystal growth and interface formation? [J].

Heinz, K ;

Starke, U ;

Bernhardt, J ;

Schardt, J .

APPLIED SURFACE SCIENCE, 2000, 162 :9-18

[5] Reconstructions of 6H-SiC(0001) surfaces studied by scanning tunneling microscopy and reflection high-energy electron diffraction [J].

Hisada, Y ;

Hayashi, K ;

Kato, K ;

Aoyama, T ;

Mukainakano, S ;

Ichimiya, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (4A) :2211-2216

[6] SURFACE-STRUCTURE AND COMPOSITION OF BETA-SIC AND 6H-SIC [J].

KAPLAN, R .

SURFACE SCIENCE, 1989, 215 (1-2) :111-134

[7] SiC(0001)3x3-Si surface reconstruction - A new insight with a STM [J].

Kulakov, MA ;

Henn, G ;

Bullemer, B .

SURFACE SCIENCE, 1996, 346 (1-3) :49-54

[8] Atomic structures of 6H-SiC(0001) and (0001) surfaces [J].

Li, L ;

Tsong, IST .

SURFACE SCIENCE, 1996, 351 (1-3) :141-148

[9] LEED holography applied to a complex superstructure: A direct view of the adatom cluster on SiC(111)-(3x3) [J].

Reuter, K ;

Schardt, J ;

Bernhardt, J ;

Wedler, K ;

Starke, U ;

Heinz, K .

PHYSICAL REVIEW B, 1998, 58 (16) :10806-10814

[10] THE ROLE OF STRAIN IN SI(111)7X7 AND RELATED RECONSTRUCTED SURFACES [J].

ROBINSON, IK .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :1966-1970

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