Characterization of thin-film aerogel porosity and stiffness with laser-generated surface acoustic waves

被引:43
作者
Flannery, CM
Murray, C
Streiter, I
Schulz, SE
机构
[1] Paul Drude Inst Solid State Elect, Nanoacoust Grp, D-10117 Berlin, Germany
[2] Tech Univ Chemnitz, Ctr Microtechnol, ZFM, D-09107 Chemnitz, Germany
关键词
porous silica; xerogels; elastic properties; dielectric properties; surface acoustic waves;
D O I
10.1016/S0040-6090(01)00827-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Density/porosity is the most important parameter determining properties of porous films; however, it is difficult to measure. This letter reports characterization of density/porosity and Young's modulus values of a range of nanoporous silica aerogel films via dispersion of laser-generated, wideband, surface acoustic waves. The technique shows a clear relationship between dielectric constant, porosity and Young's modulus. Low Young's modulus values show that film stiffness is drastically reduced with increasing porosity. The technique is rapid, non-destructive and relatively inexpensive, and yields absolute values of aerogel elastic properties, which are useful for process control; such properties are difficult to access using other techniques. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1 / 4
页数:4
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