Self-consistent modeling of high-frequency discharges sustained by azimuthally nonsymmetric surface waves

A self-consistent model of high-frequency generated discharges sustained, under the conditions of an ambipolar diffusion controlled regime, by azimuthally nonsymmetric surface waves (SW) is proposed. The potential SW propagate in cylindrical plasma column surrounded by dielectric tube, The investigation was carried out for argon plasma. A complete set of relations is formed by the charged particle balance equation, electron energy balance relation, and the equation for the potential of the surface wave electric field. The stationary gas discharge is considered It is assumed that density variation in direction of column axis is small. In this case the set of equations reduces to a set of one-dimensional ordinary differential equations in radial co-ordinate, The problem is solved numerically, Self consistent radial profiles of electron density, ambipolar velocity of particles, electron temperature and SW electric field potential are obtained.