Effects of N2/Ar flow ratio on the structures and mechanical behavior of ZrOxNy/V2O3 nano-multilayered films

被引：4

作者：

Cheng, Wenjie ^{[1
]}

Li, Wei ^{[1
]}

Wang, Jingjing ^{[1
]}

Liu, Ping ^{[1
]}

Ma, Xun ^{[1
]}

Zhang, Ke ^{[1
]}

Ma, Fengcang ^{[1
]}

Chen, Xiaohong ^{[1
]}

Liaw, Peter K. ^{[2
]}

机构：

[1] Univ Shanghai Sci & Technol, Sch Mat & Chem, Shanghai 200093, Peoples R China

[2] Univ Tennessee, Dept Mat Sci & Engn, Knoxville, TN 37996 USA

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 2022年 / 849卷

基金：

美国国家科学基金会; 中国国家自然科学基金;

关键词：

Nano-multilayered film; Magnetron sputtering; N-2; Ar flow ratio; Microstructure; Strengthening and toughening; THIN-FILMS; ELECTRICAL-PROPERTIES; TRIBOLOGICAL PROPERTIES; MULTILAYER COATINGS; FRACTURE-TOUGHNESS; THERMAL-STABILITY; CARBON-FILMS; TRANSITION; XPS; TIN;

D O I：

10.1016/j.msea.2022.143419

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The ZrOxNy/V2O3 nano-multilayered films were prepared by magnetron sputtering, using a Zr metal target and VO2 powder metallurgy target at different N2/Ar flow ratios. The effects of N2/Ar flow ratios on the microstructures, fracture toughness, and hardness of the nano-multilayered films were analyzed. The experimental results showed that the phase structures of nano-multilayered films were composed of ZrO2, V2O3, and ZrN under the influence of the N2/Ar flow ratios. The hardness value of nano-multilayered films stabilized around 10.6 GPa. The maximum H3/E*2 and H/E* values were 0.054 GPa and 0.073, respectively, when the N2/Ar flow ratio was 20/30, and the fracture toughness value was 0.879 MPa m1/2, which was approximately equal to 2.15 times of the nano-multilayered film with the N2/Ar flow ratio of 5/30, showing relatively good toughness. The varying N2/Ar flow ratios led to the lattice distortion and grain refinement of ZrOxNy/V2O3 nano-multilayered films, which promoted the optimal mechanical properties of the nano-multilayered films.

引用

页数：9

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