Coplanar-waveguide-based silicon Mach-Zehnder modulator using a meandering optical waveguide and alternating-side PN junction loading

被引：8

作者：

Dong, Po ^{[1
]}

Sinsky, Jeffrey H. ^{[1
]}

Gui, Chengcheng ^{[1
]}

机构：

[1] Nokia Bell Labs, 791 Holmdel Rd, Holmdel, NJ 07733 USA

来源：

OPTICS LETTERS | 2016年 / 41卷 / 18期

关键词：

HIGH-SPEED; VOLTAGE; DESIGN;

D O I：

10.1364/OL.41.004401

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate a silicon Mach-Zehnder modulator with a coplanar waveguide transmission-line electrode structure using a meandering optical waveguide and alternating-side PN junction loading of the electrodes, which helps suppress the signal distortion caused by the parasitic slot-line mode and improves the electro-optic (EO) bandwidth. The silicon MZM exhibits a pi-phase-shift voltage (V-pi) of 4.5 V with an EO 3 dB bandwidth of similar to 20 GHz for a 5 mm long phase shifter. This achieved V pi is among the lowest for silicononly modulators with a bandwidth of more than 20 GHz. (C) 2016 Optical Society of America

引用

页码：4401 / 4404

页数：4

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