Modern approaches in phase measuring metrology

被引：31

作者：

Millerd, J ^{[1
]}

Brock, N ^{[1
]}

Hayes, J ^{[1
]}

Kimbrough, B ^{[1
]}

Novak, M ^{[1
]}

North-Morris, M ^{[1
]}

Wyant, JC ^{[1
]}

机构：

[1] 4D Technol Corp, Tucson, AZ 85706 USA

来源：

Optical Measurement Systems for Industrial Inspection IV, Pts 1 and 2 | 2005年 / 5856卷

关键词：

interferometry; optical testing; metrology; phase measurement; measurement;

D O I：

10.1117/12.621581

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The measurement accuracy. of an interferometric optical test is generally limited by the environment. This paper discusses two single-shot interferometric techniques for reducing the sensitivity of an optical test to vibration; simultaneous phase-shifting interferometry and a special form of spatial carrier interferometry utilizing a micropolarizer phase-shifting array. In both techniques averaging can be used to reduce the effects of turbulence and the normal double frequency errors generally associated with phase-shifting interferometry.

引用

页码：14 / 22

页数：9

共 9 条

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