A novel optical microring resonator accelerometer

被引:37
作者
Bhola, Bipin [1 ]
Steier, William H. [1 ]
机构
[1] Univ So Calif, Dept Elect Engn, Los Angeles, CA 90089 USA
基金
美国国家科学基金会;
关键词
acceleration; fiber-optic sensors; microrings; resonators;
D O I
10.1109/JSEN.2007.910070
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A unique optical accelerometer based on a microring resonator fabricated on a flexible substrate is experimentally demonstrated and its performance analyzed. This accelerometer measures the applied acceleration by measuring the shift of the resonant wavelength of the flexible microring resonator. The measured sensitivity of 31 pm/g is in accordance with our calculations. Some schemes of tailoring the sensitivity and the dynamic range are also suggested.
引用
收藏
页码:1759 / 1766
页数:8
相关论文
共 24 条
[1]  
A. Mita, 2000, P 5 INT C MOT VIBR C, P1
[2]   Ultrasound detection using polymer microring optical resonator [J].
Ashkenazi, S ;
Chao, CY ;
Guo, LJ ;
O'Donnell, M .
APPLIED PHYSICS LETTERS, 2004, 85 (22) :5418-5420
[3]   Experimental demonstration of a fiber Bragg grating accelerometer [J].
Berkoff, TA ;
Kersey, AD .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1996, 8 (12) :1677-1679
[4]   Polymer microresonator strain sensors [J].
Bhola, B ;
Song, HC ;
Tazawa, H ;
Steier, WH .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2005, 17 (04) :867-869
[5]   2-MODE OPTICAL FIBER ACCELEROMETER [J].
CASTRO, FA ;
CARNEIRO, SRM ;
LISBOA, O ;
CARRARA, SLA .
OPTICS LETTERS, 1992, 17 (20) :1474-1475
[6]   Design and optimization of microring resonators in biochemical sensing applications [J].
Chao, CY ;
Guo, LJ .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 2006, 24 (03) :1395-1402
[7]   A polymer microdisk photonic sensor integrated onto silicon [J].
Cho, Sang-Yeon ;
Jokerst, Nan Marie .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2006, 18 (17-20) :2096-2098
[8]   Detection of chemical species using ultraviolet microdisk lasers [J].
Fang, W ;
Buchholz, DB ;
Bailey, RC ;
Hupp, JT ;
Chang, RPH ;
Cao, H .
APPLIED PHYSICS LETTERS, 2004, 85 (17) :3666-3668
[9]   Fiber grating sensors [J].
Kersey, AD ;
Davis, MA ;
Patrick, HJ ;
LeBlanc, M ;
Koo, KP ;
Askins, CG ;
Putnam, MA ;
Friebele, EJ .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1997, 15 (08) :1442-1463
[10]   Integrated micro ring resonator displacement sensor for scanning probe microscopies [J].
Kiyat, I ;
Kocabas, C ;
Aydinli, A .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (03) :374-381