Reversible sealing techniques for microdevice applications

被引：24

作者：

Anwar, Khalid ^{[1
]}

Han, Taeheon ^{[1
]}

Kim, Sun Min ^{[1
]}

机构：

[1] Inha Univ, Dept Mech Engn, Inchon 402751, South Korea

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2011年 / 153卷 / 02期

关键词：

Reversible sealing; Fabrication technique; Microdevice coupling; Flow analysis; Bio-molecules analysis; Cell studies; MICROCHIP CAPILLARY ELECTROPHORESIS/ELECTROCHEMISTRY; 3-DIMENSIONAL MICROFLUIDIC SYSTEMS; TRAVELING-WAVE DIELECTROPHORESIS; ON-A-CHIP; SOFT LITHOGRAPHY; POLY(DIMETHYLSILOXANE) MICROCHANNELS; ELECTROPHORESIS MICROCHIPS; ELECTROCHEMICAL DETECTION; NANOFLUIDIC CHANNELS; PALLADIUM DECOUPLER;

D O I：

10.1016/j.snb.2010.11.002

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Reversible sealing of two different functional layers is an advancing and effective technique for the fabrication of microdevices. Reversible sealing enables microdevices to be dismountable and reusable, which are promising features for the high throughput analysis by means of spatial, temporal, and parallel process. It is therefore reversible sealing is potentially being used for various research fields such as micro and nanodevice fabrication, flow analysis at microscale, biomolecule analysis, cell analysis and other related fields. This review reports on the materials and techniques used for reversible sealing and their applications in various research areas, and illustrates their advantages and disadvantages. We provide examples, where necessary and comment on the outlook for reversible sealing applied to microdevices. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：301 / 311

页数：11

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