Vacuum arc gas/metal ion sources with a magnetic field

被引：8

作者：

Oks, E ^{[1
]}

Yushkov, G ^{[1
]}

Schanin, P ^{[1
]}

Nikolaev, A ^{[1
]}

机构：

[1] STATE ACAD CONTROL SYST & RADIOELECT,TOMSK 634050,RUSSIA

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1996年 / 67卷 / 03期

关键词：

D O I：

10.1063/1.1146735

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

This types of vacuum are ion source provides the generation of ions of various gases and metals. A specific feature of these ion sources is the use of two cold-cathode are discharges to produce plasma for the extraction of ion beams. Metal ions are generated by means of a vacuum are in the metal vapor produced by cathode spots. Gas ions are generated by a constricted low-pressure are discharge. In this paper we discuss the problem as follows: the production of broad beams by extracting ions from the anode cavity in the transverse direction and the initiation of a vacuum are cathode spot by an auxiliary discharge in a strong magnetic field. (C) 1996 American Institute of Physics.

引用

页码：1213 / 1215

页数：3

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[9]

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