Molybdenum Disulfide Membrane-based Ultrasensitive Temperature Sensor

被引：2
作者：
Arora, Nishta [1 ]
Naik, Akshay [1 ]
机构：
[1] Indian Inst Sci, Ctr Nano Sci & Engn, Bengaluru, India
来源：
2021 IEEE SENSORS | 2021年
关键词：
two-dimensional materials; MoS2; intrinsic strain; frequency stability; Allan deviation;
D O I：
10.1109/SENSORS47087.2021.9639750
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report an ultrathin molybdenum disulfide (MoS2) membrane-based temperature sensor with sensitivity in the sub-Kelvin range. The resonant frequency of ultrathin MoS2 resonators is extremely sensitive to the intrinsic strain of the membrane. We utilize the resonant frequency shift caused due to change in strain to demonstrate the potential of these devices for ultrasensitive temperature sensing. The temperature coefficient of frequency (TCf) of the MoS2 drum resonator is estimated to be -283 ppm/K. We also report the first study on the frequency stability of MoS2 resonators at room temperature. The Allan deviation of these resonators is similar to 5 x 10(-5) at an integration time of 1 second. This study estimates the ultimate temperature detection limit of MoS2 membrane-based device.
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页数：4
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