Broadband ultrasonic transducers using a LiNbO3 plate with a ferroelectric inversion layer

被引:48
作者
Nakamura, K [1 ]
Fukazawa, K
Yamada, K
Saito, S
机构
[1] Tohoku Univ, Grad Sch Engn, Dept Elect & Commun Engn, Sendai, Miyagi 9808579, Japan
[2] Tokai Univ, Fac Marine Sci & Technol, Shimizu, Shizuoka 4248610, Japan
关键词
D O I
10.1109/TUFFC.2003.1251139
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
Some heat treatment of a lithium niobate (LiNbO3) plate induces domain inversion, thereby yielding a ferroelectric inversion layer. In such a piezoelectric plate with an inversion layer, even-order thickness-extensional modes, as well as odd-order modes, can be excited piezoelectrically. Therefore, the ultrasonic transducer using such a piezoelectric plate is expected to operate over a wide frequency range. In this paper, it is shown that broadband ultrasonic transducers can be obtained at a certain thickness ratio of inversion layer to plate, and that the transducer characteristics differ depending on whether the inversion layer is on the front side or on the backside. The broadband characteristics are experimentally demonstrated by fabricating transducers with 9 MHz or 75 MHz center frequency using 36 rotated Y-cut LiNbO3 plates with a ferroelectric inversion layer.
引用
收藏
页码:1558 / 1562
页数:5
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