Performance analysis of bimorph cantilever beam using piezoelectric materials and MEMS technology

被引：3

作者：

Rathod, Arun Pratap Singh ^{[1
]}

Kukreti, Kamlesh ^{[1
]}

Mishra, Abhilasha ^{[2
]}

Kumar, Brijesh ^{[3
]}

机构：

[1] Graph Era Deemed Univ, Dept Elect & Commun, Dehra Dun, Uttarakhand, India

[2] Graph Era Deemed Univ, Dept Chem, Dehra Dun, Uttarakhand, India

[3] MMMUT, Dept Elect & Commun, Gorakhpur, Uttar Pradesh, India

来源：

MATERIALS TODAY-PROCEEDINGS | 2021年 / 46卷

关键词：

MEMS; Green energy; Energy harvesting; Lead zirconate (PZT-7A); Piezoelectric materials; Bimorph cantilever beam;

D O I：

10.1016/j.matpr.2021.01.875

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This research paper is an attempt to present an insight into the use of micro electromechanical systems (MEMS) technology harvesting of green energy. One of the common examples of MEMS technology is by utilizing bimorph cantilever beams. Subsequently, it has also been discussed that Bimorph cantilever beam based sensors with high sensing ability could be used for harvesting energy from the physical environment. In this paper, we concentrate on the comparative analysis of the MEMS and piezoelectric materials which are used to design bimorph cantilever beams and convert mechanical energy into electrical energy. Detailed performance analysis of bimorph cantilever beams made of different materials has been carried out through various simulation models. Design and the simulation of bimorph cantilever beam is performed using Comsol multiphysics 5.2. state of art software. Comparative analysis of Lead zirconate (PZT-4D) and Lead zirconate (PZT-7A) has been done in this research to find more suitable material for fabrication of bimorph cantilever beams. PZT-7A is found to provide better electrical output for various analysis performed. (c) 2021 Elsevier Ltd. All rights reserved. Selection and peer-review under responsibility of the scientific committee of the International Conference on Technological Advancements in Materials Science and Manufacturing.

引用

页码：10865 / 10869

页数：5

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