Mid-Infrared ZnS Ridge Waveguide Fabricated by Femtosecond Laser Ablation Combined With Ion Irradiation

被引：1

作者：

Zhang, Xinbin ^{[1
]}

Cheng, Yazhou ^{[2
,3
]}

Zhang, Yongcheng ^{[1
]}

机构：

[1] Qingdao Univ, Coll Phys, Ctr Marine Observat & Commun, Qingdao, Peoples R China

[2] Shandong Univ, Shenzhen Res Inst, Shenzhen, Peoples R China

[3] Shandong Univ, Sch Phys, Jinan, Peoples R China

来源：

FRONTIERS IN PHYSICS | 2021年 / 9卷 / 09期

基金：

中国博士后科学基金; 中国国家自然科学基金;

关键词：

optical waveguide; femtosecond laser ablation; ZnS crystal; ion irradiation; mid-infrared; CHEMICAL BATH DEPOSITION; SPECTROSCOPY;

D O I：

10.3389/fphy.2021.731571

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We have experimentally studied the fabrication of ridge waveguides in zinc sulfide (ZnS) crystal by femtosecond laser ablation combined with Kr8+ ion irradiation. At the wavelength of 4 mu m, the waveguide at TE mode shows better guiding properties than TM mode. The transmission performance of the waveguide is improved by using thermal annealing technology to reduce the color centers and point defects in the waveguide. The waveguide propagation loss at TE mode at 4 mu m wavelength is reduced to as low as 0.6 dB/cm after annealing. Raman spectroscopy shows that Kr8+ ion irradiation does not cause large lattice damage to ZnS crystal.

引用

页数：6

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