共 15 条
[2]
Boysel RM, 2011, I NAVIG SAT DIV INT, P3930
[3]
Development of a Single-Mass Five-Axis MEMS Motion Sensor
[J].
ADVANCED MICROSYSTEMS FOR AUTOMOTIVE APPLICATIONS 2009,
2009,
:333-353
[4]
Chung T. K., 2007, TRANSD 07 EUR 21, V1, pU438
[5]
Chung T. K., 2012, ASME 2012 C SMART MA
[9]
3D CAPACITIVE VIBRATIONAL MICRO HARVESTER USING ISOTROPIC CHARGING OF ELECTRETS DEPOSITED ON VERTICAL SIDEWALLS
[J].
SMART SENSORS, ACTUATORS, AND MEMS V,
2011, 8066