The study of nanovolumes of amorphous materials using electron scattering

Many of the structural elements of importance in materials applications (e.g., thin films, barrier layers, intergranular films in ceramics) are small in volume and amorphous. Although the characterization of the structure of amorphous materials by X-ray and neutron diffraction methods is well established, these techniques are not suitable for studies of nanovolumes of materials because of the relatively small scattering cross sections. This chapter reviews recent developments in electron techniques, and particularly electron diffraction, for overcoming this problem.