Highly parallel mix-and-match fabrication of nanopillar arrays integrated in microfluidic channels for long DNA molecule separation

被引：32
作者：
Shi, J.
Fang, A. P.
Malaquin, L.
Pepin, A.
Decanini, D.
Viovy, J. L.
Chen, Y.
机构：
[1] Ecole Normale Super, F-75005 Paris, France
[2] CNRS, Lab Photon & Nanostruct, F-91460 Marcoussis, France
[3] Inst Curie, Sect Rech, CNRS UMR 168, Chim Phys Lab, F-75230 Paris, France
来源：
APPLIED PHYSICS LETTERS | 2007年 / 91卷 / 15期
关键词：
D O I：
10.1063/1.2793616
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report on a mix-and-match method based on a combination of soft UV nanoimprint lithography, contact optical lithography, and reactive-ion-etch techniques, which is applicable for high throughput manufacturing of nanostructure integrated microfluidic devices. We demonstrate the integration of high density and high aspect ratio nanopillars into microfluidic channels as electrophoresis sieving matrices. As a result, lambda DNA and T4 DNA can be separated within a few minutes. By changing the pattern design, the device could be used for separation of other types of molecules. (C) 2007 American Institute of Physics.
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