Suppressing Fine-Frequency Modes in Aluminum Nitride Microresonators

被引：11

作者：

Branch, Darren W. ^{[1
]}

Olsson, Roy H., III ^{[2
]}

机构：

[1] Sandia Natl Labs, Biosensors & Nanomat Dept, Albuquerque, NM 87185 USA

[2] Sandia Natl Labs, Adv MEMS Dept, Albuquerque, NM 87185 USA

来源：

2014 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2014年

关键词：

Aluminum nitride; Spurious Modes; FEM; COM; Lamb Waves;

D O I：

10.1109/ULTSYM.2014.0141

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Eliminating spurious modes in Aluminum Nitride (AlN) microresonators improves their insertion loss and quality factor by reducing acoustic energy leakage. Spurious modes that result from transverse wave propagation, termed fine-frequency modes, leak energy and propagate in the electrical busing and appear near the fundamental resonance. Although these modes can be predicted using threedimensional (3D) finite element methods (FEM) for devices with very short acoustic length (e.g. 1 acoustic wavelength), 3D FEM is very slow and memory intensive when compared to a two-dimensional (2D) simulation. A fast 2D coupling-of-modes (COM) model was developed to predict, identify and implement strategies to suppress the fine-frequency modes.

引用

页码：572 / 577

页数：6

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