Novel microrobots and micromotors using Lorentz force driven linear microactuators based on polymer magnets

被引：21

作者：

Feldmann, M. ^{[1
]}

Buettgenbach, S. ^{[1
]}

机构：

[1] Tech Univ Carolo Wilhelmina Braunschweig, Inst Microtechnol, D-38124 Braunschweig, Germany

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2007年 / 43卷 / 10期

关键词：

microactuators; micromotors; microrobots; polymermagnets;

D O I：

10.1109/TMAG.2007.897052

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on the development of several novel microelectromechanical systems (MEMS) machines based on linear Lorentz force actuators. These were monolithically fabricated and include micromachined polymer magnets. Polymer magnets allow a highly flexible definition of magnetic areas, arbitrary shape, and properties. By combining these linear actuators with mechanical compliant structures using Epon SU-8, we were able to build in-plane and out-of-plane micropositioners, micromotors, and microgrippers.

引用

页码：3891 / 3895

页数：5

共 14 条

[1]

[Anonymous], 2002, APPL MECH REV

[2] Composite ferromagnetic photoresist for the fabrication of microelectromechanical systems [J].

Damean, N ;

Parviz, BA ;

Lee, JN ;

Odom, T ;

Whitesides, GM .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (01) :29-34

[3] Linear variable reluctance (VR) micro motors with compensated attraction force:: Concept, simulation, fabrication and test [J].

Feldmann, M. ;

Buettgenbach, S. .

IEEE TRANSACTIONS ON MAGNETICS, 2007, 43 (06) :2567-2569

[4]

FELDMANN M, 2003, EUROSENSORS, V17, P1217

[5]

FELDMANN M, 2004, EUROSENSORS, V17, P34

[6]

FELDMANN M, 2005, INT 2005 IEEE INT MA, P978

[7] Evaluation of a linear hybrid microstep motor by means of magnetic flux measurements [J].

Hahn, M. ;

Bedenbecker, M. ;

Gatzen, H. H. .

IEEE TRANSACTIONS ON MAGNETICS, 2007, 43 (06) :2588-2590

[8] Structural optimization of a large-displacement electromagnetic Lorentz force microactuator for optical switching applications [J].

Han, JS ;

Jong, SK ;

Korvink, JG .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (11) :1585-1596

[9]

Hollar S, 2003, BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, P262

[10]

KALLENBACH E, ACTUATOR 2002, P611

← 1 2 →