Thermophysical Properties of Transparent Conductive Nb-Doped TiO2 Films

被引：0

作者：

Tasaki, Chihiro ^{[1
]}

Oka, Nobuto ^{[1
]}

Yagi, Takashi ^{[2
]}

Taketoshi, Naoyuki ^{[3
]}

Baba, Tetsuya ^{[2
]}

Kamiyama, Toshihisa ^{[4
]}

Nakamura, Shin-ichi ^{[1
]}

Shigesato, Yuzo ^{[1
]}

机构：

[1] Aoyama Gakuin Univ, Grad Sch Sci & Engn, Sagamihara, Kanagawa 2525258, Japan

[2] Inst Adv Ind Sci & Technol, Natl Metrol Inst Japan, Tsukuba, Ibaraki 3058563, Japan

[3] Inst Adv Ind Sci & Technol, Int Stand Promot Div, Ctr 2, Tsukuba, Ibaraki 3058568, Japan

[4] AGC Ceram Co Ltd, Takasago, Hyogo 6768655, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2012年 / 51卷 / 03期

关键词：

INDIUM OXIDE-FILMS; ANATASE;

D O I：

10.1143/JJAP.51.035802

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The thermophysical properties of Nb-doped TiO2 (Nb:TiO2) films were studied in terms of electrical conductivity and Nb concentration. The thermal diffusivity of Nb:TiO2 films with various Nb concentrations was investigated and found to range from (1.2-2.1) x 10(-6) m(2) s(-1). The thermal conductivity of Nb:TiO2 films with 8.5 at.% Nb concentration is proportional to the electrical conductivity in conformity with the Wiedemann-Franz law. The thermal conductivity carried by phonons, lambda(ph), of Nb:TiO2 films decreased with increasing Nb concentration. The mean free path of phonons, l(ph), in Nb:TiO2 films was estimated to be almost the same as the average distance between Nb impurities. The grain size was much larger than l(ph). Thus, phonon scattering by Nb impurities should be the dominant factor for the change in lambda(ph). (C) 2012 The Japan Society of Applied Physics

引用

页数：5

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