Self-mixing interferometer based on sinusoidal phase modulating technique

被引：89

作者：

Guo, DM ^{[1
]}

Wang, M ^{[1
]}

Tan, SQ ^{[1
]}

机构：

[1] Nanjing Normal Univ, Dept Phys, Nanjing 210097, Peoples R China

来源：

OPTICS EXPRESS | 2005年 / 13卷 / 05期

关键词：

D O I：

10.1364/OPEX.13.001537

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new self-mixing interferometry based on sinusoidal phase modulating technique is presented. Self-mixing interference occurs in the laser cavity by reflecting the light from a mirror-like target in front of the laser. Sinusoidal phase modulation of the beam is obtained by an electro-optic modulator (EOM) in the external cavity. The phase of the interference signal is calculated by Fourier analysis method. The interferometer is applied to measure the displacement of a high-precision commercial PZT with an accuracy of < 10nm. The measurement range of the system mainly depends on the maximum operating frequency of EOM and the maximum sampling rate of A/D converter. (C) 2005 Optical Society of America.

引用

页码：1537 / 1543

页数：7

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