Direct measurement of CVD diamond film thermal conductivity by using photoacoustics

被引:8
作者
Obraztsov, AN [1 ]
Pavlovsky, IY
Okushi, H
Watanabe, H
机构
[1] Moscow MV Lomonosov State Univ, Dept Phys, Moscow 119899, Russia
[2] Electrotech Lab, Tsukuba, Ibaraki 305, Japan
关键词
CVD diamond; thermal conductivity; photoacoustics; Raman; luminescence;
D O I
10.1016/S0925-9635(98)00227-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Photoacoustics (PA) is a type of photothermal effect and differs from the other one, known as the "mirage" effect, by the generation of thermal deflection waves as acoustic waves in a gas adjacent to the sample due to the modulated light absorption. We analyzed the feasibility of using PA for direct measurement of thermal conductivity of diamond films. The method was tested on two types of diamond polycrystalline films grown by chemical vapor deposition in plasma of direct current and microwave discharges. The thermal conductivity properties of the diamond films obtained are discussed by taking into account the Raman, photoluminescent, cathodoluminescent and other properties of these materials. The thermal conductivity values are shown to depend on polycrystalline diamond him structural characteristics that are defined by the conditions of the deposition. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:1513 / 1518
页数:6
相关论文
共 12 条
[1]   THERMAL-DIFFUSIVITY OF ISOTOPICALLY ENRICHED C-12 DIAMOND [J].
ANTHONY, TR ;
BANHOLZER, WF ;
FLEISCHER, JF ;
WEI, LH ;
KUO, PK ;
THOMAS, RL ;
PRYOR, RW .
PHYSICAL REVIEW B, 1990, 42 (02) :1104-1111
[2]   THE CHARACTERIZATION OF POINT-DEFECTS IN DIAMOND BY LUMINESCENCE SPECTROSCOPY [J].
COLLINS, AT .
DIAMOND AND RELATED MATERIALS, 1992, 1 (5-6) :457-469
[3]  
DAVIES G, 1994, PROPERTIES GROWTH DI, P33
[4]   THERMAL MEASUREMENTS ON DIAMOND AND RELATED MATERIALS [J].
FOURNIER, D ;
PLAMANN, K .
DIAMOND AND RELATED MATERIALS, 1995, 4 (5-6) :809-819
[5]  
Graebner J. E., 1993, Diamond Films and Technology, V3, P77
[6]   PHONON-SCATTERING IN CHEMICAL-VAPOR-DEPOSITED DIAMOND [J].
GRAEBNER, JE ;
REISS, ME ;
SEIBLES, L ;
HARTNETT, TM ;
MILLER, RP ;
ROBINSON, CJ .
PHYSICAL REVIEW B, 1994, 50 (06) :3702-3713
[7]  
Obraztsov AN, 1997, SCANNING, V19, P455, DOI 10.1002/sca.4950190701
[8]   Comparative study of optical absorption in diamond powders and polycrystalline CVD films [J].
Obraztsov, AN ;
Okushi, H ;
Watanabe, H ;
Pavlovsky, IY .
DIAMOND AND RELATED MATERIALS, 1997, 6 (09) :1124-1128
[9]  
Rosencwaig, 1980, PHOTOACOUSTICS PHOTO, P309
[10]   THEORY OF PHOTOACOUSTIC EFFECT WITH SOLIDS [J].
ROSENCWAIG, A ;
GERSHO, A .
JOURNAL OF APPLIED PHYSICS, 1976, 47 (01) :64-69