Fabrication of an interdigitated sample holder for dielectric spectroscopy of thin films

被引：1

作者：

Shenouda, Mina ^{[1
]}

Oliver, Derek R. ^{[1
]}

机构：

[1] Univ Manitoba, Dept Elect & Comp Engn, Winnipeg, MB R3T 5V6, Canada

来源：

6TH INTERNATIONAL CONFERENCE ON OPTICAL, OPTOELECTRONIC AND PHOTONIC MATERIALS AND APPLICATIONS (ICOOPMA) 2014 | 2015年 / 619卷

关键词：

COMPLEX PERMITTIVITY; MICROWAVE-FREQUENCIES;

D O I：

10.1088/1742-6596/619/1/012028

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A planar interdigitated sample substrate has been designed to support a thin-film sample of a polymer while the frequency-dependent dielectric properties of the thin film are measured. Trenches for the electrodes were etched into a SiO2/Si wafer surface. Chromium was used as an adhesion layer prior to thermal evaporation of copper for the body of the electrode. The device was placed in a standard probe station and the dielectric character was recorded as a function of frequency with an impedance analyser. Devices with 20 to 70 fingers were measured and the results compared to analytical and finite element simulations. At 1 kHz, the total capacitance of a typical 20-finger device was 8 pF. The capacitive contribution of the thin film due to the fringing field in the polymer was about 2% of the total capacitance of the fabricated structures.

引用

页数：4

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