Evolutionary Computing and Optimal Design of MEMS

被引：15
作者：
Di Barba, Paolo [1 ]
Wiak, Slawomir [2 ]
机构：
[1] Univ Pavia, Dept Elect Comp & Biomed Engn, I-27100 Pavia, Italy
[2] Lodz Univ Technol, Inst Mechatron & Informat Syst, PL-90924 Lodz, Poland
来源：
IEEE-ASME TRANSACTIONS ON MECHATRONICS | 2015年 / 20卷 / 04期
关键词：
Comb-drive electrostatic microactuator; electrothermo-elastic microactuator; field analysis and synthesis; finite-element method; magnetic micromirror; microelectromechanical systems (MEMS); multiobjective optimal shape design; MICROACTUATORS; OPTIMIZATION; MICROGRIPPER; ACTUATORS; BOUNDARY; DEVICE;
D O I：
10.1109/TMECH.2014.2343241
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Fostered by the development of new technologies, microelectromechanical systems (MEMS) are massively present on board of vehicles, within information equipment as well as in medical and healthcare equipment. A smart approach to the design of MEMS devices is in terms of the simultaneous optimization of multiple objective functions subject to a set of constraints. This leads to the family of solutions minimizing the degree of conflict among the objectives (Pareto front). Accordingly, in this paper, a procedure of optimal shape design of MEMS based on evolutionary computing is proposed and validated on three case studies.
引用
收藏
页码：1660 / 1667
页数：8
相关论文
共 21 条
[1]  
Back T., 1996, EVOLUTIONARY ALGORIT, DOI DOI 10.1093/OSO/9780195099713.001.0001
[2]   Modeling and Optimal Force Control of a Nonlinear Electrostatic Microgripper [J].
Boudaoud, Mokrane ;
Haddab, Yassine ;
Le Gorrec, Yann .
IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2013, 18 (03) :1130-1139
[3]   Optimal shape design of electrostatic microactuators: A multiobjective formulation [J].
Chereches, R. ;
Di Barba, P. ;
Topa, V. ;
Purcar, M. ;
Wiak, S. .
INTERNATIONAL JOURNAL OF APPLIED ELECTROMAGNETICS AND MECHANICS, 2013, 43 (1-2) :65-76
[4]  
Deb K., 2010, MULTIOBJECTIVE OPTIM
[5]   Gradient based optimization of semi-numerical models with symbolic sensitivity: Application to a simple ferromagnetic MEMS switch device [J].
Delinchant, B. ;
Rakotoarison, H. L. ;
Ardon, V. ;
Chadebec, O. ;
Cugat, O. .
INTERNATIONAL JOURNAL OF APPLIED ELECTROMAGNETICS AND MECHANICS, 2009, 30 (3-4) :189-200
[6]  
Di Barba P., 2011, INT COMPUMAG SOC NEW, V18, P3
[7]  
Di Barba P., 2010, Multiobjective shape design in electricity and magnetism
[8]  
Di Barba P., 2008, FIELD MODELS ELECT M
[9]   A Magneto-Thermo-Elastic Identification Problem with a Moving Boundary in a Micro-Device [J].
Di Barba, Paolo ;
Lorenzi, Alfredo .
MILAN JOURNAL OF MATHEMATICS, 2013, 81 (02) :347-383
[10]   Analytical model for analysis and design of V-shaped thermal microactuators [J].
Enikov, ET ;
Kedar, SS ;
Lazarov, KV .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2005, 14 (04) :788-798
123