Calibration of the in-plane PFM response by the lateral force curves

被引:12
作者
Alikin, D. O. [1 ]
Abramov, A. S. [1 ]
Kosobokov, M. S. [1 ]
Gimadeeva, L. V. [1 ]
Romanyuk, K. N. [1 ,2 ,3 ]
Slabov, V. [2 ,3 ]
Shur, V. Ya. [1 ]
Kholkin, A. L. [2 ,3 ]
机构
[1] Ural Fed Univ, Sch Nat Sci & Math, Ekaterinburg, Russia
[2] Univ Aveiro, Dept Phys, Aveiro, Portugal
[3] Univ Aveiro, CICECO Aveiro Inst Mat, Aveiro, Portugal
基金
俄罗斯科学基金会;
关键词
Calibration; lateral force curves; lateral PFM; quantitative PFM; RECONSTRUCTION; POLARIZATION;
D O I
10.1080/00150193.2020.1722000
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Calibration technique for lateral piezoresponse force microscopy (PFM) based on lateral force curves measurements is introduced and discussed in terms of relative error connected with experimental realization. Dependences of lateral calibration coefficient on the tip motion velocity, normal loading force, humidity environment, and position of laser spot on the cantilever beam are considered. The maximal error of the measurements does not exceed 10%, which is close to the error of typical vertical PFM signal calibration based on force-distance curves. Proposed calibration technique is easy and accurate, which is important for the future development of quantitative PFM method.
引用
收藏
页码:15 / 21
页数:7
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