Micromachined WR-3 waveguide filter with embedded bends

被引：27

作者：

Shang, X. ^{[1
]}

Ke, M. L. ^{[1
]}

Wang, Y. ^{[1
]}

Lancaster, M. J. ^{[1
]}

机构：

[1] Univ Birmingham, Sch Elect & Comp Engn, Birmingham B15 2TT, W Midlands, England

来源：

ELECTRONICS LETTERS | 2011年 / 47卷 / 09期

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

10.1049/el.2011.0525

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Presented is a micromachined WR-3 waveguide filter with two embedded H-plane back-to-back bends fabricated using thick SU-8 photoresist micromachining technology. The filter was constructed with four silver-coated SU-8 layers with a thickness of 0.432 mm for each layer. These layers were then bonded on top of each other to form the filter. This layered WR-3 waveguide filter with bends exhibited a minimum insertion loss of 3.3 dB and an 8.8% 3 dB fractional bandwidth at a central frequency of 293.2 GHz. The measured return loss is better than 16 dB across the whole passband.

引用

页码：545 / 547

页数：3

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